High Technology on Small Scale Since 2004
290 Broadway
Suite 298
Methuen, MA 01844
ph: +1 978-305-0479
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Replacement parts for 50KeV and 30KeV Focused Ion Beam systems manufactured by former Micrion, and later by FEI Company as "Peabody platform" FIB tools under brand names Vectra for Circuit Edit and Acura for Mask Repair applications.
Replacement spare parts for FIB systems made on FEI Hillsboro platform and consumable parts for Micrion and FEI Hilsboro FIB tools are listed on other pages of this site.
Low-cost, rebuildable extractor assembly for Sidewinder FIB column from FEI Company. Two versions are available to fit columns with 20nA nominal current, such as used on V600 tools, and 65nA nominal current, such as used on Quanta, Q3D, and Helios systems. Unlike the disposable OEM design, this assembly can be rebuilt and re-used mutiple times, up to 5 rebuilds were reported by users. Rebuilding kits for DIY refurbishment are also available.
Lowest-cost on the market plug-in replacement CDM detector compatible with multiple models of FIB and FIB/SEM equipment manufactured by FEI Compay
Compatible with all versions of 5nm Jupiter Head FIB column, including columns with inipolar and bypolar Lens 1, used on Micrion 2500, Miciron 9500, Micrion 9800, Vectra 986 and other Focused Ion Beam tools built on 50 KeV platform.
Repair service, or replacement by fully tested tested 50KV and 30KV power supplies of both Bertran and Accel models, with worldwide installation service and warranty
Replacement joysticks, keyboards, spare pushbuttons for operator console, and fully reconditioned operator consoles for Micrion, FEI Vectra, and FEI Acura FIBs. Repair service for operator consoles of all FEI and Micrion FIB models is available.
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Consumable parts for Micrion FIB
Web: www.partbeamsystech.com
Web: www.freudlabs.com
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MEO Engineering Company, Inc., D.B.A. "PBS&T" ("Particle Beam Systems and Technology") provides range of technological solutions, including third-party service, support, parts, and consumables for FIB, SEM, and dual-beam FIB/SEM instrumentation. PBS&T does not represent, not affiliated with, and not supported by OEMs of FIB, SEM, and FIB/SEM instrumentation. All trademarks identifying supported FIB, SEM, and FIB/SEM equipment and components are property of their respective owners and nominatively used for the sole purpose of accurately identifying equipment compatible with the parts and services provided by PBS&T, MEO Engineering Company, Inc.
Copyright 2013 - 2017
PBS&T, MEO Engineering Company, Inc. All rights reserved.
290 Broadway
Suite 298
Methuen, MA 01844
ph: +1 978-305-0479
vray